4/20/2011	12:27:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	12:27:47 AM	Recipe started at 12:27 AM
4/20/2011	12:27:47 AM	Helium valve closed
4/20/2011	12:27:47 AM	H2 valve closed
4/20/2011	12:27:47 AM	BCl3 valve closed
4/20/2011	12:27:47 AM	PH3 valve closed
4/20/2011	12:27:47 AM	SiCl4 pre valve closed
4/20/2011	12:27:47 AM	SiCl4 post valve closed
4/20/2011	12:27:47 AM	Main Vac valve closed
4/20/2011	12:27:47 AM	Bubbler valve closed
4/20/2011	12:27:47 AM	Bypass valve opened
4/20/2011	12:27:47 AM	Helium MFC set to  0.000000
4/20/2011	12:27:47 AM	H2 MFC set to  0.000000
4/20/2011	12:27:47 AM	BCl3 MFC set to  0.000000
4/20/2011	12:27:47 AM	PHl3 MFC set to  0.000000
4/20/2011	12:27:47 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:27:47 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:27:47 AM	Tube furnace set to 0
4/20/2011	12:28:19 AM	Helium valve closed
4/20/2011	12:28:19 AM	H2 valve closed
4/20/2011	12:28:19 AM	BCl3 valve closed
4/20/2011	12:28:19 AM	PH3 valve closed
4/20/2011	12:28:19 AM	SiCl4 pre valve closed
4/20/2011	12:28:19 AM	SiCl4 post valve closed
4/20/2011	12:28:19 AM	Bubbler valve closed
4/20/2011	12:28:19 AM	Main Vac valve opened
4/20/2011	12:28:19 AM	Bypass valve opened
4/20/2011	12:28:19 AM	Helium MFC set to  0.000000
4/20/2011	12:28:19 AM	H2 MFC set to  0.000000
4/20/2011	12:28:19 AM	BCl3 MFC set to  0.000000
4/20/2011	12:28:19 AM	PHl3 MFC set to  0.000000
4/20/2011	12:28:19 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:28:19 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:28:19 AM	Tube furnace set to 0
4/20/2011	12:28:20 AM	Run finished at 12:28 AM
4/20/2011	12:28:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	12:42:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2011	12:42:53 AM	Recipe started at 12:42 AM
4/20/2011	12:42:53 AM	H2 valve closed
4/20/2011	12:42:53 AM	BCl3 valve closed
4/20/2011	12:42:53 AM	PH3 valve closed
4/20/2011	12:42:53 AM	SiCl4 pre valve closed
4/20/2011	12:42:53 AM	SiCl4 post valve closed
4/20/2011	12:42:53 AM	Main Vac valve closed
4/20/2011	12:42:53 AM	Bypass valve closed
4/20/2011	12:42:53 AM	Bubbler valve closed
4/20/2011	12:42:53 AM	Helium valve opened
4/20/2011	12:42:53 AM	Helium MFC set to  500.000000
4/20/2011	12:42:53 AM	H2 MFC set to  0.000000
4/20/2011	12:42:53 AM	BCl3 MFC set to  0.000000
4/20/2011	12:42:53 AM	PHl3 MFC set to  0.000000
4/20/2011	12:42:53 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:42:53 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:42:53 AM	Tube furnace set to 0
4/20/2011	12:44:13 AM	Helium valve closed
4/20/2011	12:44:13 AM	H2 valve closed
4/20/2011	12:44:13 AM	BCl3 valve closed
4/20/2011	12:44:13 AM	PH3 valve closed
4/20/2011	12:44:13 AM	SiCl4 pre valve closed
4/20/2011	12:44:13 AM	SiCl4 post valve closed
4/20/2011	12:44:13 AM	Main Vac valve closed
4/20/2011	12:44:13 AM	Bypass valve closed
4/20/2011	12:44:13 AM	Bubbler valve closed
4/20/2011	12:44:13 AM	Helium MFC set to  0.000000
4/20/2011	12:44:13 AM	H2 MFC set to  0.000000
4/20/2011	12:44:13 AM	BCl3 MFC set to  0.000000
4/20/2011	12:44:13 AM	PHl3 MFC set to  0.000000
4/20/2011	12:44:13 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:44:13 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:44:13 AM	Tube furnace set to 0
4/20/2011	12:44:13 AM	Run finished at 12:44 AM
4/20/2011	12:44:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2011	12:49:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	12:49:42 AM	Recipe started at 12:49 AM
4/20/2011	12:49:42 AM	Helium valve closed
4/20/2011	12:49:42 AM	H2 valve closed
4/20/2011	12:49:42 AM	BCl3 valve closed
4/20/2011	12:49:42 AM	PH3 valve closed
4/20/2011	12:49:42 AM	SiCl4 pre valve closed
4/20/2011	12:49:42 AM	SiCl4 post valve closed
4/20/2011	12:49:42 AM	Main Vac valve closed
4/20/2011	12:49:42 AM	Bubbler valve closed
4/20/2011	12:49:42 AM	Bypass valve opened
4/20/2011	12:49:42 AM	Helium MFC set to  0.000000
4/20/2011	12:49:42 AM	H2 MFC set to  0.000000
4/20/2011	12:49:42 AM	BCl3 MFC set to  0.000000
4/20/2011	12:49:42 AM	PHl3 MFC set to  0.000000
4/20/2011	12:49:42 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:49:42 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:49:42 AM	Tube furnace set to 0
4/20/2011	12:50:13 AM	Helium valve closed
4/20/2011	12:50:13 AM	H2 valve closed
4/20/2011	12:50:13 AM	BCl3 valve closed
4/20/2011	12:50:13 AM	PH3 valve closed
4/20/2011	12:50:13 AM	SiCl4 pre valve closed
4/20/2011	12:50:13 AM	SiCl4 post valve closed
4/20/2011	12:50:13 AM	Bubbler valve closed
4/20/2011	12:50:13 AM	Main Vac valve opened
4/20/2011	12:50:13 AM	Bypass valve opened
4/20/2011	12:50:13 AM	Helium MFC set to  0.000000
4/20/2011	12:50:13 AM	H2 MFC set to  0.000000
4/20/2011	12:50:13 AM	BCl3 MFC set to  0.000000
4/20/2011	12:50:13 AM	PHl3 MFC set to  0.000000
4/20/2011	12:50:13 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:50:13 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:50:13 AM	Tube furnace set to 0
4/20/2011	12:50:14 AM	Run finished at 12:50 AM
4/20/2011	12:50:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	12:52:23 AM	Helium valve opened
4/20/2011	12:52:26 AM	Helium MFC set to  100.000000
4/20/2011	12:54:51 AM	Helium valve closed
4/20/2011	12:54:54 AM	Helium MFC set to  0.000000
4/20/2011	12:55:23 AM	Recipe started at 12:55 AM
4/20/2011	12:55:23 AM	BCl3 valve closed
4/20/2011	12:55:23 AM	PH3 valve closed
4/20/2011	12:55:23 AM	SiCl4 pre valve closed
4/20/2011	12:55:23 AM	SiCl4 post valve closed
4/20/2011	12:55:23 AM	Main Vac valve closed
4/20/2011	12:55:23 AM	Bypass valve closed
4/20/2011	12:55:23 AM	Bubbler valve closed
4/20/2011	12:55:23 AM	Helium valve opened
4/20/2011	12:55:23 AM	H2 valve opened
4/20/2011	12:55:23 AM	Helium MFC set to  190.000000
4/20/2011	12:55:23 AM	H2 MFC set to  10.000000
4/20/2011	12:55:23 AM	BCl3 MFC set to  0.000000
4/20/2011	12:55:23 AM	PHl3 MFC set to  0.000000
4/20/2011	12:55:23 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:55:23 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:55:23 AM	Tube furnace set to 0
4/20/2011	12:58:46 AM	BCl3 valve closed
4/20/2011	12:58:46 AM	PH3 valve closed
4/20/2011	12:58:46 AM	SiCl4 pre valve closed
4/20/2011	12:58:46 AM	SiCl4 post valve closed
4/20/2011	12:58:46 AM	Main Vac valve closed
4/20/2011	12:58:46 AM	Bypass valve closed
4/20/2011	12:58:46 AM	Helium valve opened
4/20/2011	12:58:46 AM	H2 valve opened
4/20/2011	12:58:46 AM	Bubbler valve opened
4/20/2011	12:58:46 AM	Helium MFC set to  47.500000
4/20/2011	12:58:46 AM	H2 MFC set to  2.500000
4/20/2011	12:58:46 AM	BCl3 MFC set to  0.000000
4/20/2011	12:58:46 AM	PHl3 MFC set to  0.000000
4/20/2011	12:58:46 AM	SiCl4 MFC set to  0.000000
4/20/2011	12:58:46 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	12:58:46 AM	Tube furnace set to 350
4/20/2011	8:37:25 AM	Run aborted at 8:37 AM
4/20/2011	8:37:25 AM	Helium valve closed
4/20/2011	8:37:25 AM	H2 valve closed
4/20/2011	8:37:25 AM	BCl3 valve closed
4/20/2011	8:37:25 AM	PH3 valve closed
4/20/2011	8:37:25 AM	SiCl4 pre valve closed
4/20/2011	8:37:25 AM	SiCl4 post valve closed
4/20/2011	8:37:25 AM	Bypass valve closed
4/20/2011	8:37:25 AM	Main Vac valve closed
4/20/2011	8:37:25 AM	Bubbler valve closed
4/20/2011	8:37:25 AM	Helium MFC set to  0.000000
4/20/2011	8:37:25 AM	H2 MFC set to  0.000000
4/20/2011	8:37:25 AM	BCl3 MFC set to  0.000000
4/20/2011	8:37:25 AM	PHl3 MFC set to  0.000000
4/20/2011	8:37:25 AM	SiCl4 MFC set to  0.000000
4/20/2011	8:37:25 AM	Tube furnace set to 0
4/20/2011	8:38:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	8:38:29 AM	Recipe started at 8:38 AM
4/20/2011	8:38:29 AM	Helium valve closed
4/20/2011	8:38:29 AM	H2 valve closed
4/20/2011	8:38:29 AM	BCl3 valve closed
4/20/2011	8:38:29 AM	PH3 valve closed
4/20/2011	8:38:29 AM	SiCl4 pre valve closed
4/20/2011	8:38:29 AM	SiCl4 post valve closed
4/20/2011	8:38:29 AM	Main Vac valve closed
4/20/2011	8:38:29 AM	Bubbler valve closed
4/20/2011	8:38:29 AM	Bypass valve opened
4/20/2011	8:38:29 AM	Helium MFC set to  0.000000
4/20/2011	8:38:29 AM	H2 MFC set to  0.000000
4/20/2011	8:38:29 AM	BCl3 MFC set to  0.000000
4/20/2011	8:38:29 AM	PHl3 MFC set to  0.000000
4/20/2011	8:38:29 AM	SiCl4 MFC set to  0.000000
4/20/2011	8:38:29 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	8:38:30 AM	Tube furnace set to 0
4/20/2011	8:39:00 AM	Helium valve closed
4/20/2011	8:39:00 AM	H2 valve closed
4/20/2011	8:39:00 AM	BCl3 valve closed
4/20/2011	8:39:00 AM	PH3 valve closed
4/20/2011	8:39:00 AM	SiCl4 pre valve closed
4/20/2011	8:39:00 AM	SiCl4 post valve closed
4/20/2011	8:39:00 AM	Bubbler valve closed
4/20/2011	8:39:00 AM	Main Vac valve opened
4/20/2011	8:39:00 AM	Bypass valve opened
4/20/2011	8:39:00 AM	Helium MFC set to  0.000000
4/20/2011	8:39:00 AM	H2 MFC set to  0.000000
4/20/2011	8:39:00 AM	BCl3 MFC set to  0.000000
4/20/2011	8:39:00 AM	PHl3 MFC set to  0.000000
4/20/2011	8:39:00 AM	SiCl4 MFC set to  0.000000
4/20/2011	8:39:00 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	8:39:00 AM	Tube furnace set to 0
4/20/2011	8:39:00 AM	Run finished at 8:39 AM
4/20/2011	8:39:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	8:55:05 AM	Helium valve opened
4/20/2011	8:55:17 AM	Helium MFC set to  100.000000
4/20/2011	8:55:21 AM	Helium valve closed
4/20/2011	8:55:27 AM	Helium MFC set to  0.000000
4/20/2011	8:55:32 AM	Tube furnace set to 100
4/20/2011	8:55:46 AM	Tube furnace set to 0
4/20/2011	8:56:03 AM	Helium valve opened
4/20/2011	8:56:05 AM	Helium valve closed
4/20/2011	9:04:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2011	9:04:55 AM	Recipe started at 9:04 AM
4/20/2011	9:04:55 AM	H2 valve closed
4/20/2011	9:04:55 AM	BCl3 valve closed
4/20/2011	9:04:55 AM	PH3 valve closed
4/20/2011	9:04:55 AM	SiCl4 pre valve closed
4/20/2011	9:04:55 AM	SiCl4 post valve closed
4/20/2011	9:04:55 AM	Main Vac valve closed
4/20/2011	9:04:55 AM	Bypass valve closed
4/20/2011	9:04:55 AM	Bubbler valve closed
4/20/2011	9:04:55 AM	Helium valve opened
4/20/2011	9:04:55 AM	Helium MFC set to  500.000000
4/20/2011	9:04:55 AM	H2 MFC set to  0.000000
4/20/2011	9:04:55 AM	BCl3 MFC set to  0.000000
4/20/2011	9:04:55 AM	PHl3 MFC set to  0.000000
4/20/2011	9:04:55 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:04:55 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:04:55 AM	Tube furnace set to 0
4/20/2011	9:06:15 AM	Helium valve closed
4/20/2011	9:06:15 AM	H2 valve closed
4/20/2011	9:06:15 AM	BCl3 valve closed
4/20/2011	9:06:15 AM	PH3 valve closed
4/20/2011	9:06:15 AM	SiCl4 pre valve closed
4/20/2011	9:06:15 AM	SiCl4 post valve closed
4/20/2011	9:06:15 AM	Main Vac valve closed
4/20/2011	9:06:15 AM	Bypass valve closed
4/20/2011	9:06:15 AM	Bubbler valve closed
4/20/2011	9:06:15 AM	Helium MFC set to  0.000000
4/20/2011	9:06:15 AM	H2 MFC set to  0.000000
4/20/2011	9:06:15 AM	BCl3 MFC set to  0.000000
4/20/2011	9:06:15 AM	PHl3 MFC set to  0.000000
4/20/2011	9:06:15 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:06:15 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:06:15 AM	Tube furnace set to 0
4/20/2011	9:06:15 AM	Run finished at 9:06 AM
4/20/2011	9:06:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2011	9:23:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	9:23:06 AM	Recipe started at 9:23 AM
4/20/2011	9:23:06 AM	Helium valve closed
4/20/2011	9:23:06 AM	H2 valve closed
4/20/2011	9:23:06 AM	BCl3 valve closed
4/20/2011	9:23:06 AM	PH3 valve closed
4/20/2011	9:23:06 AM	SiCl4 pre valve closed
4/20/2011	9:23:06 AM	SiCl4 post valve closed
4/20/2011	9:23:06 AM	Main Vac valve closed
4/20/2011	9:23:06 AM	Bubbler valve closed
4/20/2011	9:23:06 AM	Bypass valve opened
4/20/2011	9:23:06 AM	Helium MFC set to  0.000000
4/20/2011	9:23:06 AM	H2 MFC set to  0.000000
4/20/2011	9:23:06 AM	BCl3 MFC set to  0.000000
4/20/2011	9:23:06 AM	PHl3 MFC set to  0.000000
4/20/2011	9:23:06 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:23:06 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:23:06 AM	Tube furnace set to 0
4/20/2011	9:23:38 AM	Helium valve closed
4/20/2011	9:23:38 AM	H2 valve closed
4/20/2011	9:23:38 AM	BCl3 valve closed
4/20/2011	9:23:38 AM	PH3 valve closed
4/20/2011	9:23:38 AM	SiCl4 pre valve closed
4/20/2011	9:23:38 AM	SiCl4 post valve closed
4/20/2011	9:23:38 AM	Bubbler valve closed
4/20/2011	9:23:38 AM	Main Vac valve opened
4/20/2011	9:23:38 AM	Bypass valve opened
4/20/2011	9:23:38 AM	Helium MFC set to  0.000000
4/20/2011	9:23:38 AM	H2 MFC set to  0.000000
4/20/2011	9:23:38 AM	BCl3 MFC set to  0.000000
4/20/2011	9:23:38 AM	PHl3 MFC set to  0.000000
4/20/2011	9:23:38 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:23:38 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:23:38 AM	Tube furnace set to 0
4/20/2011	9:23:38 AM	Run finished at 9:23 AM
4/20/2011	9:23:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	9:26:53 AM	Bypass valve closed
4/20/2011	9:26:53 AM	Main Vac valve closed
4/20/2011	9:27:19 AM	Main Vac valve opened
4/20/2011	9:27:19 AM	Bypass valve opened
4/20/2011	9:32:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/20/2011	9:32:27 AM	Recipe started at 9:32 AM
4/20/2011	9:32:27 AM	Helium valve closed
4/20/2011	9:32:27 AM	H2 valve closed
4/20/2011	9:32:27 AM	BCl3 valve closed
4/20/2011	9:32:27 AM	PH3 valve closed
4/20/2011	9:32:27 AM	SiCl4 pre valve closed
4/20/2011	9:32:27 AM	SiCl4 post valve closed
4/20/2011	9:32:27 AM	Main Vac valve closed
4/20/2011	9:32:27 AM	Bubbler valve closed
4/20/2011	9:32:27 AM	Bypass valve opened
4/20/2011	9:32:27 AM	Helium MFC set to  0.000000
4/20/2011	9:32:27 AM	H2 MFC set to  0.000000
4/20/2011	9:32:27 AM	BCl3 MFC set to  0.000000
4/20/2011	9:32:27 AM	PHl3 MFC set to  0.000000
4/20/2011	9:32:27 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:32:27 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:32:27 AM	Tube furnace set to 0
4/20/2011	9:32:27 AM	Helium valve closed
4/20/2011	9:32:27 AM	H2 valve closed
4/20/2011	9:32:27 AM	BCl3 valve closed
4/20/2011	9:32:27 AM	PH3 valve closed
4/20/2011	9:32:27 AM	SiCl4 pre valve closed
4/20/2011	9:32:27 AM	SiCl4 post valve closed
4/20/2011	9:32:27 AM	Bubbler valve closed
4/20/2011	9:32:27 AM	Main Vac valve opened
4/20/2011	9:32:27 AM	Bypass valve opened
4/20/2011	9:32:27 AM	Helium MFC set to  0.000000
4/20/2011	9:32:27 AM	H2 MFC set to  0.000000
4/20/2011	9:32:27 AM	BCl3 MFC set to  0.000000
4/20/2011	9:32:27 AM	PHl3 MFC set to  0.000000
4/20/2011	9:32:27 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:32:27 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:32:27 AM	Tube furnace set to 0
4/20/2011	9:33:27 AM	H2 valve closed
4/20/2011	9:33:27 AM	BCl3 valve closed
4/20/2011	9:33:27 AM	PH3 valve closed
4/20/2011	9:33:27 AM	SiCl4 pre valve closed
4/20/2011	9:33:27 AM	SiCl4 post valve closed
4/20/2011	9:33:27 AM	Bubbler valve closed
4/20/2011	9:33:27 AM	Helium valve opened
4/20/2011	9:33:28 AM	Main Vac valve opened
4/20/2011	9:33:28 AM	Bypass valve opened
4/20/2011	9:33:28 AM	Helium MFC set to  100.000000
4/20/2011	9:33:28 AM	H2 MFC set to  0.000000
4/20/2011	9:33:28 AM	BCl3 MFC set to  0.000000
4/20/2011	9:33:28 AM	PHl3 MFC set to  0.000000
4/20/2011	9:33:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:33:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:33:28 AM	Tube furnace set to 0
4/20/2011	9:34:28 AM	Helium valve closed
4/20/2011	9:34:28 AM	H2 valve closed
4/20/2011	9:34:28 AM	BCl3 valve closed
4/20/2011	9:34:28 AM	PH3 valve closed
4/20/2011	9:34:28 AM	SiCl4 pre valve closed
4/20/2011	9:34:28 AM	SiCl4 post valve closed
4/20/2011	9:34:28 AM	Bubbler valve closed
4/20/2011	9:34:28 AM	Main Vac valve opened
4/20/2011	9:34:28 AM	Bypass valve opened
4/20/2011	9:34:28 AM	Helium MFC set to  0.000000
4/20/2011	9:34:28 AM	H2 MFC set to  0.000000
4/20/2011	9:34:28 AM	BCl3 MFC set to  0.000000
4/20/2011	9:34:28 AM	PHl3 MFC set to  0.000000
4/20/2011	9:34:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:34:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:34:28 AM	Tube furnace set to 0
4/20/2011	9:35:28 AM	H2 valve closed
4/20/2011	9:35:28 AM	BCl3 valve closed
4/20/2011	9:35:28 AM	PH3 valve closed
4/20/2011	9:35:28 AM	SiCl4 pre valve closed
4/20/2011	9:35:28 AM	SiCl4 post valve closed
4/20/2011	9:35:28 AM	Bubbler valve closed
4/20/2011	9:35:28 AM	Helium valve opened
4/20/2011	9:35:28 AM	Main Vac valve opened
4/20/2011	9:35:28 AM	Bypass valve opened
4/20/2011	9:35:28 AM	Helium MFC set to  100.000000
4/20/2011	9:35:28 AM	H2 MFC set to  0.000000
4/20/2011	9:35:28 AM	BCl3 MFC set to  0.000000
4/20/2011	9:35:28 AM	PHl3 MFC set to  0.000000
4/20/2011	9:35:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:35:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:35:28 AM	Tube furnace set to 0
4/20/2011	9:36:28 AM	Helium valve closed
4/20/2011	9:36:28 AM	H2 valve closed
4/20/2011	9:36:28 AM	BCl3 valve closed
4/20/2011	9:36:28 AM	PH3 valve closed
4/20/2011	9:36:28 AM	SiCl4 pre valve closed
4/20/2011	9:36:28 AM	SiCl4 post valve closed
4/20/2011	9:36:28 AM	Bubbler valve closed
4/20/2011	9:36:28 AM	Main Vac valve opened
4/20/2011	9:36:28 AM	Bypass valve opened
4/20/2011	9:36:28 AM	Helium MFC set to  0.000000
4/20/2011	9:36:28 AM	H2 MFC set to  0.000000
4/20/2011	9:36:28 AM	BCl3 MFC set to  0.000000
4/20/2011	9:36:28 AM	PHl3 MFC set to  0.000000
4/20/2011	9:36:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:36:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:36:28 AM	Tube furnace set to 0
4/20/2011	9:37:28 AM	H2 valve closed
4/20/2011	9:37:28 AM	BCl3 valve closed
4/20/2011	9:37:28 AM	PH3 valve closed
4/20/2011	9:37:28 AM	SiCl4 pre valve closed
4/20/2011	9:37:28 AM	SiCl4 post valve closed
4/20/2011	9:37:28 AM	Bubbler valve closed
4/20/2011	9:37:28 AM	Helium valve opened
4/20/2011	9:37:28 AM	Main Vac valve opened
4/20/2011	9:37:28 AM	Bypass valve opened
4/20/2011	9:37:28 AM	Helium MFC set to  100.000000
4/20/2011	9:37:28 AM	H2 MFC set to  0.000000
4/20/2011	9:37:28 AM	BCl3 MFC set to  0.000000
4/20/2011	9:37:28 AM	PHl3 MFC set to  0.000000
4/20/2011	9:37:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:37:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:37:28 AM	Tube furnace set to 0
4/20/2011	9:38:28 AM	Helium valve closed
4/20/2011	9:38:28 AM	H2 valve closed
4/20/2011	9:38:28 AM	BCl3 valve closed
4/20/2011	9:38:28 AM	PH3 valve closed
4/20/2011	9:38:28 AM	SiCl4 pre valve closed
4/20/2011	9:38:28 AM	SiCl4 post valve closed
4/20/2011	9:38:28 AM	Bubbler valve closed
4/20/2011	9:38:28 AM	Main Vac valve opened
4/20/2011	9:38:28 AM	Bypass valve opened
4/20/2011	9:38:28 AM	Helium MFC set to  0.000000
4/20/2011	9:38:28 AM	H2 MFC set to  0.000000
4/20/2011	9:38:28 AM	BCl3 MFC set to  0.000000
4/20/2011	9:38:28 AM	PHl3 MFC set to  0.000000
4/20/2011	9:38:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:38:29 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:38:29 AM	Tube furnace set to 0
4/20/2011	9:39:29 AM	H2 valve closed
4/20/2011	9:39:29 AM	BCl3 valve closed
4/20/2011	9:39:29 AM	PH3 valve closed
4/20/2011	9:39:29 AM	SiCl4 pre valve closed
4/20/2011	9:39:29 AM	SiCl4 post valve closed
4/20/2011	9:39:29 AM	Bubbler valve closed
4/20/2011	9:39:29 AM	Helium valve opened
4/20/2011	9:39:29 AM	Main Vac valve opened
4/20/2011	9:39:29 AM	Bypass valve opened
4/20/2011	9:39:29 AM	Helium MFC set to  100.000000
4/20/2011	9:39:29 AM	H2 MFC set to  0.000000
4/20/2011	9:39:29 AM	BCl3 MFC set to  0.000000
4/20/2011	9:39:29 AM	PHl3 MFC set to  0.000000
4/20/2011	9:39:29 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:39:29 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:39:29 AM	Tube furnace set to 0
4/20/2011	9:40:29 AM	Helium valve closed
4/20/2011	9:40:29 AM	H2 valve closed
4/20/2011	9:40:29 AM	BCl3 valve closed
4/20/2011	9:40:29 AM	PH3 valve closed
4/20/2011	9:40:29 AM	SiCl4 pre valve closed
4/20/2011	9:40:29 AM	SiCl4 post valve closed
4/20/2011	9:40:29 AM	Bubbler valve closed
4/20/2011	9:40:29 AM	Main Vac valve opened
4/20/2011	9:40:29 AM	Bypass valve opened
4/20/2011	9:40:29 AM	Helium MFC set to  0.000000
4/20/2011	9:40:29 AM	H2 MFC set to  0.000000
4/20/2011	9:40:29 AM	BCl3 MFC set to  0.000000
4/20/2011	9:40:29 AM	PHl3 MFC set to  0.000000
4/20/2011	9:40:29 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:40:29 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:40:29 AM	Tube furnace set to 0
4/20/2011	9:41:29 AM	H2 valve closed
4/20/2011	9:41:29 AM	BCl3 valve closed
4/20/2011	9:41:29 AM	PH3 valve closed
4/20/2011	9:41:29 AM	SiCl4 pre valve closed
4/20/2011	9:41:29 AM	SiCl4 post valve closed
4/20/2011	9:41:29 AM	Bubbler valve closed
4/20/2011	9:41:29 AM	Helium valve opened
4/20/2011	9:41:29 AM	Main Vac valve opened
4/20/2011	9:41:29 AM	Bypass valve opened
4/20/2011	9:41:29 AM	Helium MFC set to  100.000000
4/20/2011	9:41:29 AM	H2 MFC set to  0.000000
4/20/2011	9:41:29 AM	BCl3 MFC set to  0.000000
4/20/2011	9:41:29 AM	PHl3 MFC set to  0.000000
4/20/2011	9:41:29 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:41:29 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:41:29 AM	Tube furnace set to 0
4/20/2011	9:42:29 AM	Helium valve closed
4/20/2011	9:42:29 AM	H2 valve closed
4/20/2011	9:42:29 AM	BCl3 valve closed
4/20/2011	9:42:29 AM	PH3 valve closed
4/20/2011	9:42:29 AM	SiCl4 pre valve closed
4/20/2011	9:42:29 AM	SiCl4 post valve closed
4/20/2011	9:42:29 AM	Bubbler valve closed
4/20/2011	9:42:29 AM	Main Vac valve opened
4/20/2011	9:42:29 AM	Bypass valve opened
4/20/2011	9:42:29 AM	Helium MFC set to  0.000000
4/20/2011	9:42:29 AM	H2 MFC set to  0.000000
4/20/2011	9:42:29 AM	BCl3 MFC set to  0.000000
4/20/2011	9:42:29 AM	PHl3 MFC set to  0.000000
4/20/2011	9:42:29 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:42:29 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:42:29 AM	Tube furnace set to 0
4/20/2011	9:43:30 AM	H2 valve closed
4/20/2011	9:43:30 AM	BCl3 valve closed
4/20/2011	9:43:30 AM	PH3 valve closed
4/20/2011	9:43:30 AM	SiCl4 pre valve closed
4/20/2011	9:43:30 AM	SiCl4 post valve closed
4/20/2011	9:43:30 AM	Bubbler valve closed
4/20/2011	9:43:30 AM	Helium valve opened
4/20/2011	9:43:30 AM	Main Vac valve opened
4/20/2011	9:43:30 AM	Bypass valve opened
4/20/2011	9:43:30 AM	Helium MFC set to  100.000000
4/20/2011	9:43:30 AM	H2 MFC set to  0.000000
4/20/2011	9:43:30 AM	BCl3 MFC set to  0.000000
4/20/2011	9:43:30 AM	PHl3 MFC set to  0.000000
4/20/2011	9:43:30 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:43:30 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:43:30 AM	Tube furnace set to 0
4/20/2011	9:44:30 AM	Helium valve closed
4/20/2011	9:44:30 AM	H2 valve closed
4/20/2011	9:44:30 AM	BCl3 valve closed
4/20/2011	9:44:30 AM	PH3 valve closed
4/20/2011	9:44:30 AM	SiCl4 pre valve closed
4/20/2011	9:44:30 AM	SiCl4 post valve closed
4/20/2011	9:44:30 AM	Bubbler valve closed
4/20/2011	9:44:30 AM	Main Vac valve opened
4/20/2011	9:44:30 AM	Bypass valve opened
4/20/2011	9:44:30 AM	Helium MFC set to  0.000000
4/20/2011	9:44:30 AM	H2 MFC set to  0.000000
4/20/2011	9:44:30 AM	BCl3 MFC set to  0.000000
4/20/2011	9:44:30 AM	PHl3 MFC set to  0.000000
4/20/2011	9:44:30 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:44:30 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:44:30 AM	Tube furnace set to 0
4/20/2011	9:45:30 AM	H2 valve closed
4/20/2011	9:45:30 AM	BCl3 valve closed
4/20/2011	9:45:30 AM	PH3 valve closed
4/20/2011	9:45:30 AM	SiCl4 pre valve closed
4/20/2011	9:45:30 AM	SiCl4 post valve closed
4/20/2011	9:45:30 AM	Bubbler valve closed
4/20/2011	9:45:30 AM	Helium valve opened
4/20/2011	9:45:30 AM	Main Vac valve opened
4/20/2011	9:45:30 AM	Bypass valve opened
4/20/2011	9:45:30 AM	Helium MFC set to  100.000000
4/20/2011	9:45:30 AM	H2 MFC set to  0.000000
4/20/2011	9:45:30 AM	BCl3 MFC set to  0.000000
4/20/2011	9:45:30 AM	PHl3 MFC set to  0.000000
4/20/2011	9:45:30 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:45:30 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:45:30 AM	Tube furnace set to 0
4/20/2011	9:46:30 AM	Helium valve closed
4/20/2011	9:46:30 AM	H2 valve closed
4/20/2011	9:46:30 AM	BCl3 valve closed
4/20/2011	9:46:30 AM	PH3 valve closed
4/20/2011	9:46:30 AM	SiCl4 pre valve closed
4/20/2011	9:46:30 AM	SiCl4 post valve closed
4/20/2011	9:46:30 AM	Bubbler valve closed
4/20/2011	9:46:30 AM	Main Vac valve opened
4/20/2011	9:46:30 AM	Bypass valve opened
4/20/2011	9:46:30 AM	Helium MFC set to  0.000000
4/20/2011	9:46:30 AM	H2 MFC set to  0.000000
4/20/2011	9:46:30 AM	BCl3 MFC set to  0.000000
4/20/2011	9:46:30 AM	PHl3 MFC set to  0.000000
4/20/2011	9:46:30 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:46:30 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:46:30 AM	Tube furnace set to 0
4/20/2011	9:47:30 AM	H2 valve closed
4/20/2011	9:47:30 AM	BCl3 valve closed
4/20/2011	9:47:30 AM	PH3 valve closed
4/20/2011	9:47:30 AM	SiCl4 pre valve closed
4/20/2011	9:47:30 AM	SiCl4 post valve closed
4/20/2011	9:47:30 AM	Bubbler valve closed
4/20/2011	9:47:30 AM	Helium valve opened
4/20/2011	9:47:30 AM	Main Vac valve opened
4/20/2011	9:47:30 AM	Bypass valve opened
4/20/2011	9:47:30 AM	Helium MFC set to  100.000000
4/20/2011	9:47:30 AM	H2 MFC set to  0.000000
4/20/2011	9:47:30 AM	BCl3 MFC set to  0.000000
4/20/2011	9:47:30 AM	PHl3 MFC set to  0.000000
4/20/2011	9:47:30 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:47:30 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:47:30 AM	Tube furnace set to 0
4/20/2011	9:48:31 AM	Helium valve closed
4/20/2011	9:48:31 AM	H2 valve closed
4/20/2011	9:48:31 AM	BCl3 valve closed
4/20/2011	9:48:31 AM	PH3 valve closed
4/20/2011	9:48:31 AM	SiCl4 pre valve closed
4/20/2011	9:48:31 AM	SiCl4 post valve closed
4/20/2011	9:48:31 AM	Bubbler valve closed
4/20/2011	9:48:31 AM	Main Vac valve opened
4/20/2011	9:48:31 AM	Bypass valve opened
4/20/2011	9:48:31 AM	Helium MFC set to  0.000000
4/20/2011	9:48:31 AM	H2 MFC set to  0.000000
4/20/2011	9:48:31 AM	BCl3 MFC set to  0.000000
4/20/2011	9:48:31 AM	PHl3 MFC set to  0.000000
4/20/2011	9:48:31 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:48:31 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:48:31 AM	Tube furnace set to 0
4/20/2011	9:49:31 AM	H2 valve closed
4/20/2011	9:49:31 AM	BCl3 valve closed
4/20/2011	9:49:31 AM	PH3 valve closed
4/20/2011	9:49:31 AM	SiCl4 pre valve closed
4/20/2011	9:49:31 AM	SiCl4 post valve closed
4/20/2011	9:49:31 AM	Bubbler valve closed
4/20/2011	9:49:31 AM	Helium valve opened
4/20/2011	9:49:31 AM	Main Vac valve opened
4/20/2011	9:49:31 AM	Bypass valve opened
4/20/2011	9:49:31 AM	Helium MFC set to  100.000000
4/20/2011	9:49:31 AM	H2 MFC set to  0.000000
4/20/2011	9:49:31 AM	BCl3 MFC set to  0.000000
4/20/2011	9:49:31 AM	PHl3 MFC set to  0.000000
4/20/2011	9:49:31 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:49:31 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:49:31 AM	Tube furnace set to 0
4/20/2011	9:50:31 AM	Helium valve closed
4/20/2011	9:50:31 AM	H2 valve closed
4/20/2011	9:50:31 AM	BCl3 valve closed
4/20/2011	9:50:31 AM	PH3 valve closed
4/20/2011	9:50:31 AM	SiCl4 pre valve closed
4/20/2011	9:50:31 AM	SiCl4 post valve closed
4/20/2011	9:50:31 AM	Bubbler valve closed
4/20/2011	9:50:31 AM	Main Vac valve opened
4/20/2011	9:50:31 AM	Bypass valve opened
4/20/2011	9:50:31 AM	Helium MFC set to  0.000000
4/20/2011	9:50:31 AM	H2 MFC set to  0.000000
4/20/2011	9:50:31 AM	BCl3 MFC set to  0.000000
4/20/2011	9:50:31 AM	PHl3 MFC set to  0.000000
4/20/2011	9:50:31 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:50:31 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:50:31 AM	Tube furnace set to 0
4/20/2011	9:51:31 AM	H2 valve closed
4/20/2011	9:51:31 AM	BCl3 valve closed
4/20/2011	9:51:31 AM	PH3 valve closed
4/20/2011	9:51:31 AM	SiCl4 pre valve closed
4/20/2011	9:51:31 AM	SiCl4 post valve closed
4/20/2011	9:51:31 AM	Bubbler valve closed
4/20/2011	9:51:31 AM	Helium valve opened
4/20/2011	9:51:31 AM	Main Vac valve opened
4/20/2011	9:51:31 AM	Bypass valve opened
4/20/2011	9:51:31 AM	Helium MFC set to  100.000000
4/20/2011	9:51:31 AM	H2 MFC set to  0.000000
4/20/2011	9:51:31 AM	BCl3 MFC set to  0.000000
4/20/2011	9:51:31 AM	PHl3 MFC set to  0.000000
4/20/2011	9:51:31 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:51:31 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:51:31 AM	Tube furnace set to 0
4/20/2011	9:52:31 AM	Helium valve closed
4/20/2011	9:52:31 AM	H2 valve closed
4/20/2011	9:52:31 AM	BCl3 valve closed
4/20/2011	9:52:31 AM	PH3 valve closed
4/20/2011	9:52:31 AM	SiCl4 pre valve closed
4/20/2011	9:52:31 AM	SiCl4 post valve closed
4/20/2011	9:52:31 AM	Bubbler valve closed
4/20/2011	9:52:31 AM	Main Vac valve opened
4/20/2011	9:52:31 AM	Bypass valve opened
4/20/2011	9:52:31 AM	Helium MFC set to  0.000000
4/20/2011	9:52:31 AM	H2 MFC set to  0.000000
4/20/2011	9:52:31 AM	BCl3 MFC set to  0.000000
4/20/2011	9:52:31 AM	PHl3 MFC set to  0.000000
4/20/2011	9:52:31 AM	SiCl4 MFC set to  0.000000
4/20/2011	9:52:31 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	9:52:32 AM	Tube furnace set to 0
4/20/2011	9:52:33 AM	Run finished at 9:52 AM
4/20/2011	9:52:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/20/2011	9:57:36 AM	Bypass valve closed
4/20/2011	9:57:36 AM	Main Vac valve closed
4/20/2011	9:58:11 AM	Bypass valve opened
4/20/2011	9:58:12 AM	Main Vac valve opened
4/20/2011	9:58:20 AM	Helium valve opened
4/20/2011	9:58:23 AM	Helium MFC set to  100.000000
4/20/2011	9:59:09 AM	Helium valve closed
4/20/2011	9:59:13 AM	Helium MFC set to  0.000000
4/20/2011	10:03:36 AM	Recipe started at 10:03 AM
4/20/2011	10:03:36 AM	Helium valve closed
4/20/2011	10:03:36 AM	BCl3 valve closed
4/20/2011	10:03:36 AM	PH3 valve closed
4/20/2011	10:03:36 AM	SiCl4 pre valve closed
4/20/2011	10:03:36 AM	SiCl4 post valve closed
4/20/2011	10:03:36 AM	Main Vac valve closed
4/20/2011	10:03:36 AM	Bypass valve closed
4/20/2011	10:03:36 AM	Bubbler valve closed
4/20/2011	10:03:36 AM	H2 valve opened
4/20/2011	10:03:36 AM	Helium MFC set to  0.000000
4/20/2011	10:03:36 AM	H2 MFC set to  500.000000
4/20/2011	10:03:36 AM	BCl3 MFC set to  0.000000
4/20/2011	10:03:36 AM	PHl3 MFC set to  0.000000
4/20/2011	10:03:36 AM	SiCl4 MFC set to  0.000000
4/20/2011	10:03:36 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	10:03:37 AM	Tube furnace set to 100
4/20/2011	10:04:58 AM	Helium valve closed
4/20/2011	10:04:58 AM	BCl3 valve closed
4/20/2011	10:04:58 AM	PH3 valve closed
4/20/2011	10:04:58 AM	SiCl4 pre valve closed
4/20/2011	10:04:58 AM	SiCl4 post valve closed
4/20/2011	10:04:58 AM	Main Vac valve closed
4/20/2011	10:04:58 AM	Bypass valve closed
4/20/2011	10:04:58 AM	H2 valve opened
4/20/2011	10:04:58 AM	Bubbler valve opened
4/20/2011	10:04:58 AM	Helium MFC set to  0.000000
4/20/2011	10:04:58 AM	H2 MFC set to  500.000000
4/20/2011	10:04:58 AM	BCl3 MFC set to  0.000000
4/20/2011	10:04:58 AM	PHl3 MFC set to  0.000000
4/20/2011	10:04:58 AM	SiCl4 MFC set to  0.000000
4/20/2011	10:04:58 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	10:04:59 AM	Tube furnace set to 1000
4/20/2011	10:24:58 AM	Helium valve closed
4/20/2011	10:24:58 AM	PH3 valve closed
4/20/2011	10:24:58 AM	Main Vac valve closed
4/20/2011	10:24:58 AM	Bypass valve closed
4/20/2011	10:24:58 AM	H2 valve opened
4/20/2011	10:24:58 AM	BCl3 valve opened
4/20/2011	10:24:59 AM	SiCl4 pre valve opened
4/20/2011	10:24:59 AM	SiCl4 post valve opened
4/20/2011	10:24:59 AM	Bubbler valve opened
4/20/2011	10:24:59 AM	Helium MFC set to  0.000000
4/20/2011	10:24:59 AM	H2 MFC set to  500.000000
4/20/2011	10:24:59 AM	BCl3 MFC set to  3.000000
4/20/2011	10:24:59 AM	PHl3 MFC set to  0.000000
4/20/2011	10:24:59 AM	SiCl4 MFC set to  50.000000
4/20/2011	10:24:59 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	10:24:59 AM	Tube furnace set to 1000
4/20/2011	10:41:39 AM	H2 valve closed
4/20/2011	10:41:39 AM	BCl3 valve closed
4/20/2011	10:41:39 AM	PH3 valve closed
4/20/2011	10:41:39 AM	SiCl4 pre valve closed
4/20/2011	10:41:39 AM	SiCl4 post valve closed
4/20/2011	10:41:39 AM	Main Vac valve closed
4/20/2011	10:41:39 AM	Bypass valve closed
4/20/2011	10:41:39 AM	Helium valve opened
4/20/2011	10:41:39 AM	Bubbler valve opened
4/20/2011	10:41:39 AM	Helium MFC set to  500.000000
4/20/2011	10:41:39 AM	H2 MFC set to  0.000000
4/20/2011	10:41:39 AM	BCl3 MFC set to  0.000000
4/20/2011	10:41:39 AM	PHl3 MFC set to  0.000000
4/20/2011	10:41:39 AM	SiCl4 MFC set to  0.000000
4/20/2011	10:41:39 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	10:41:39 AM	Tube furnace set to 0
4/20/2011	11:01:39 AM	Helium valve closed
4/20/2011	11:01:39 AM	H2 valve closed
4/20/2011	11:01:39 AM	BCl3 valve closed
4/20/2011	11:01:39 AM	PH3 valve closed
4/20/2011	11:01:39 AM	SiCl4 pre valve closed
4/20/2011	11:01:39 AM	SiCl4 post valve closed
4/20/2011	11:01:39 AM	Main Vac valve closed
4/20/2011	11:01:39 AM	Bypass valve closed
4/20/2011	11:01:39 AM	Bubbler valve closed
4/20/2011	11:01:39 AM	Helium MFC set to  0.000000
4/20/2011	11:01:39 AM	H2 MFC set to  0.000000
4/20/2011	11:01:39 AM	BCl3 MFC set to  0.000000
4/20/2011	11:01:39 AM	PHl3 MFC set to  0.000000
4/20/2011	11:01:39 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:01:39 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:01:39 AM	Tube furnace set to 0
4/20/2011	11:01:39 AM	Run finished at 11:01 AM
4/20/2011	11:18:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2011	11:18:22 AM	Recipe started at 11:18 AM
4/20/2011	11:18:22 AM	H2 valve closed
4/20/2011	11:18:22 AM	BCl3 valve closed
4/20/2011	11:18:22 AM	PH3 valve closed
4/20/2011	11:18:22 AM	SiCl4 pre valve closed
4/20/2011	11:18:22 AM	SiCl4 post valve closed
4/20/2011	11:18:22 AM	Main Vac valve closed
4/20/2011	11:18:22 AM	Bypass valve closed
4/20/2011	11:18:22 AM	Bubbler valve closed
4/20/2011	11:18:22 AM	Helium valve opened
4/20/2011	11:18:22 AM	Helium MFC set to  500.000000
4/20/2011	11:18:22 AM	H2 MFC set to  0.000000
4/20/2011	11:18:22 AM	BCl3 MFC set to  0.000000
4/20/2011	11:18:22 AM	PHl3 MFC set to  0.000000
4/20/2011	11:18:22 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:18:22 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:18:22 AM	Tube furnace set to 0
4/20/2011	11:18:28 AM	Helium valve closed
4/20/2011	11:18:28 AM	H2 valve closed
4/20/2011	11:18:28 AM	BCl3 valve closed
4/20/2011	11:18:28 AM	PH3 valve closed
4/20/2011	11:18:28 AM	SiCl4 pre valve closed
4/20/2011	11:18:28 AM	SiCl4 post valve closed
4/20/2011	11:18:28 AM	Main Vac valve closed
4/20/2011	11:18:28 AM	Bypass valve closed
4/20/2011	11:18:28 AM	Bubbler valve closed
4/20/2011	11:18:28 AM	Helium MFC set to  0.000000
4/20/2011	11:18:28 AM	H2 MFC set to  0.000000
4/20/2011	11:18:28 AM	BCl3 MFC set to  0.000000
4/20/2011	11:18:28 AM	PHl3 MFC set to  0.000000
4/20/2011	11:18:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:18:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:18:28 AM	Tube furnace set to 0
4/20/2011	11:18:28 AM	Run finished at 11:18 AM
4/20/2011	11:18:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/20/2011	11:24:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	11:24:28 AM	Recipe started at 11:24 AM
4/20/2011	11:24:28 AM	Helium valve closed
4/20/2011	11:24:28 AM	H2 valve closed
4/20/2011	11:24:28 AM	BCl3 valve closed
4/20/2011	11:24:28 AM	PH3 valve closed
4/20/2011	11:24:28 AM	SiCl4 pre valve closed
4/20/2011	11:24:28 AM	SiCl4 post valve closed
4/20/2011	11:24:28 AM	Main Vac valve closed
4/20/2011	11:24:28 AM	Bubbler valve closed
4/20/2011	11:24:28 AM	Bypass valve opened
4/20/2011	11:24:28 AM	Helium MFC set to  0.000000
4/20/2011	11:24:28 AM	H2 MFC set to  0.000000
4/20/2011	11:24:28 AM	BCl3 MFC set to  0.000000
4/20/2011	11:24:28 AM	PHl3 MFC set to  0.000000
4/20/2011	11:24:28 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:24:28 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:24:28 AM	Tube furnace set to 0
4/20/2011	11:25:00 AM	Helium valve closed
4/20/2011	11:25:00 AM	H2 valve closed
4/20/2011	11:25:00 AM	BCl3 valve closed
4/20/2011	11:25:00 AM	PH3 valve closed
4/20/2011	11:25:00 AM	SiCl4 pre valve closed
4/20/2011	11:25:00 AM	SiCl4 post valve closed
4/20/2011	11:25:00 AM	Bubbler valve closed
4/20/2011	11:25:00 AM	Main Vac valve opened
4/20/2011	11:25:00 AM	Bypass valve opened
4/20/2011	11:25:00 AM	Helium MFC set to  0.000000
4/20/2011	11:25:00 AM	H2 MFC set to  0.000000
4/20/2011	11:25:00 AM	BCl3 MFC set to  0.000000
4/20/2011	11:25:00 AM	PHl3 MFC set to  0.000000
4/20/2011	11:25:00 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:25:00 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:25:00 AM	Tube furnace set to 0
4/20/2011	11:25:00 AM	Run finished at 11:25 AM
4/20/2011	11:25:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	11:26:29 AM	Tube furnace set to 10
4/20/2011	11:26:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/20/2011	11:26:48 AM	Recipe started at 11:26 AM
4/20/2011	11:26:48 AM	Helium valve closed
4/20/2011	11:26:48 AM	H2 valve closed
4/20/2011	11:26:48 AM	BCl3 valve closed
4/20/2011	11:26:48 AM	PH3 valve closed
4/20/2011	11:26:48 AM	SiCl4 pre valve closed
4/20/2011	11:26:48 AM	SiCl4 post valve closed
4/20/2011	11:26:48 AM	Main Vac valve closed
4/20/2011	11:26:48 AM	Bypass valve closed
4/20/2011	11:26:48 AM	Bubbler valve closed
4/20/2011	11:26:48 AM	Helium MFC set to  0.000000
4/20/2011	11:26:48 AM	H2 MFC set to  0.000000
4/20/2011	11:26:48 AM	BCl3 MFC set to  0.000000
4/20/2011	11:26:48 AM	PHl3 MFC set to  0.000000
4/20/2011	11:26:48 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:26:48 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:26:48 AM	Tube furnace set to 0
4/20/2011	11:26:48 AM	Run finished at 11:26 AM
4/20/2011	11:26:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/20/2011	11:27:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	11:27:17 AM	Recipe started at 11:27 AM
4/20/2011	11:27:18 AM	Helium valve closed
4/20/2011	11:27:18 AM	H2 valve closed
4/20/2011	11:27:18 AM	BCl3 valve closed
4/20/2011	11:27:18 AM	PH3 valve closed
4/20/2011	11:27:18 AM	SiCl4 pre valve closed
4/20/2011	11:27:18 AM	SiCl4 post valve closed
4/20/2011	11:27:18 AM	Main Vac valve closed
4/20/2011	11:27:18 AM	Bubbler valve closed
4/20/2011	11:27:18 AM	Bypass valve opened
4/20/2011	11:27:18 AM	Helium MFC set to  0.000000
4/20/2011	11:27:18 AM	H2 MFC set to  0.000000
4/20/2011	11:27:18 AM	BCl3 MFC set to  0.000000
4/20/2011	11:27:18 AM	PHl3 MFC set to  0.000000
4/20/2011	11:27:18 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:27:18 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:27:18 AM	Tube furnace set to 0
4/20/2011	11:27:18 AM	Helium valve closed
4/20/2011	11:27:18 AM	H2 valve closed
4/20/2011	11:27:18 AM	BCl3 valve closed
4/20/2011	11:27:18 AM	PH3 valve closed
4/20/2011	11:27:18 AM	SiCl4 pre valve closed
4/20/2011	11:27:18 AM	SiCl4 post valve closed
4/20/2011	11:27:18 AM	Bubbler valve closed
4/20/2011	11:27:18 AM	Main Vac valve opened
4/20/2011	11:27:18 AM	Bypass valve opened
4/20/2011	11:27:18 AM	Helium MFC set to  0.000000
4/20/2011	11:27:18 AM	H2 MFC set to  0.000000
4/20/2011	11:27:18 AM	BCl3 MFC set to  0.000000
4/20/2011	11:27:18 AM	PHl3 MFC set to  0.000000
4/20/2011	11:27:18 AM	SiCl4 MFC set to  0.000000
4/20/2011	11:27:18 AM	Bypass solenoid MFC set to  0.000000
4/20/2011	11:27:18 AM	Tube furnace set to 0
4/20/2011	11:27:18 AM	Run finished at 11:27 AM
4/20/2011	11:27:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/20/2011	11:28:26 AM	Tube furnace set to 10
